TeraPure is the template cleaning system of choice for revolutionary Nano-Imprint Lithography (NIL) processing.  At the heart of the TeraPure is proven cleaning technology and HamaTech’s industry-recognized highest first-pass cleaning yield.  A modular design offers customers the flexibility needed for a dynamic and developing technology, such as NIL.

Standard TeraPure Configuration

• Two separate cleaning chambers chambers
  • Unique in-situ UV surface preparation and cleaning
  • High frequency dual Megasonic cleaning up to 4MHz
  • Precision Nano Binary spray
  • High temperature dehydration
  • Ultra-clean Hot and Cold DI water
  • Electrolyzed H2 and Ozonated DI water, Ultra-Dilute SC1,CO2-DI
• Web Cam wet process online monitoring
• Flexible automation for 65nm master templates and 6” replicas
• Low contact linear substrate transfer handling
• Individual input/output and substrate buffer stations
• Degassing DI-H20 input functionality
• 30nm prcess media filtration