The MaskTrack Pro EUVL Mask Management Module offers the industry’s only solution for a holistic mask management environment.  The innovative design allows pod-in-pod stocking, inner pod-in-pod decontamination, full integration of metrology and third-party systems clustering.

Standard EUVL Automation Module Configuration

• Direct and closed-loop interface to MaskTrack Pro cleaning system
• Capable of full metrology integration
• Allows clustering of third-party systems
• Functional as a stand-alone unit
• Pod-in-Pod loadport (compatible with NXE3100 scanner)
• EUV Inner-Pod handling, opening and stocking system
• Interface to MaskTrack Pro cleaning system
• Local XCDA controlled environment
• Accepts standard SMIF boxes for transfer to/from SMIF to pod-in-pod