Products

Next-to-New Equipment

At HamaTech, our engineers have carefully designed our products to last.  Over the past 20 years, more than 500 systems have been installed at customer facilities around the world.  With equipment lifetimes of over 10 - 15 years, many of these systems are still in operation today demonstrating the true value of German engineering.  

Demand for early generation system platforms is strong and HamaTech’s Next-to-New Equipment program is the answer.  Next-to-New Equipment is refurbished in the factory by technical experts to ensure the highest level of conformity to specification and is upgraded to meet new technical and safety requirements.  Each system  comes with installation, process qualification and a full 6 month warranty.  

The Next-to-New program is the choice for customers wanting to extend their mask manufacturing capabilities with systems that match existing processes and procedures, complement the existing installed base and are refurbished by the experts.  For R&D departments and institutions, the HamaTech Next-to-New program offers flexible, versatile platforms for single substrate manual processing and pilot production programs.

Our current Next-to-New equipment is listed below.  The list will be updated periodically with additional hard-to-find equipment.  If you do not see what you are looking for on the list please contact us at info@hamatech.de or click on the Contact section of the website.  All equipment is available on a first come, first serve basis.  

We looking forward to helping you find the perfect match for your equipment needs.

Available Next-to-New Systems: MaskTrack

System MaskTrack Develop    
Description Automated Aqueous Develop Tool
Tool ID 210 327
Media Cabinet 2x MaskTrack standard cabinet, refill box for 3 media
Process Chamber 2x Process chamber with each:
1x Linear arm with low impact puddle nozzle,
Gas free developer dispense system,
Surfactant dispense system
1x Swing arm with hole nozzle
4x fanspray, 1x beam rinse, backside rinse, chamber rinse
Operating System MS Windows
Other Robot handler, SMIF loadport, Aligner, Controlled Mini-Environment
HEPA filter, electronic media flow control, Air ionizer system, sump pump
4x Julabo TCU for media temperature control, UPS, Waste cabinet
Footprint (w x l x h) Main tool:
Media cabinet (double unit):
Climate control unit KS2:
EMO-Box:
TCU double unit:
Waste cabinet:
Sump pump unit:
Refill Box:
3329mm x 1532mm x 2895mm,
1706mm x 700mm x 1889mm
1200mm x 952mm x 2114mm
800mm x 300mm x 1000mm
350mm x 790mm x 536mm (2x)
1200mm x 750mm x 1346mm
700mm x 600mm x 520mm
935mm x 235mm x 280mm

Available Next-to New Systems: ASx Series

System APB    
Description Automatic Bake System
Tool ID 210 328
Configuration 1 hotplate, 1 cooling plate
Operating System Windows;
Other 1 CPF 3002 with cooling function; 1 Versaport; 1 Julabo incl. HEPA filtration
Footprint (w x l x h) System: 1200 x 1200 x 2350 mm Media Cabinet 714 x 1200 x 850 mm EMO Box 600 x 250 x 1000 mm Julabo 350 x 658 x 545 mm CPF 750 x 1050 x 2000 mm


System ASP5500    
Description Automated Single Substrate Processor (Aqueous Develop)
Tool ID 210 206
Media Cabinet 1x standard cabinet, 2x Refill system, 6 media tanks
Process Chamber 2x puddle arm, fulljet arm, 2x low impact puddle nozzle,
Gas free developer dispense system, 4x binary nozzle,
Chamber rinse, backside rinse
Operating System MS Windows
Other Robot handler, SMIF loadport, Aligner, 3 acclimatization stations,
Controlled Mini-Environment with chemical filtration, HEPA filter,
2x Julabo for media temperature control; electronic media flow control
Footprint (w x d x h) Main tool:
Media cabinet:
Climate control unit:
Chemical filtration unit:
EMO-Box:
Electric Box:
TCU:
Refill Box:
1800mm x 1200mm x 2358mm
700mm x 1200mm x 1739mm
750mm x 1550mm x 1930mm
750mm x 1050mm x 1745
600mm x 250mm x 1000mm
600mm x 210mm x 600
350mm x 850mm x 780mm
780mm x 235mm x 280mm

Available Next-to New Systems: HMx Series

System   HME90  
Description Manual Substrate Solvent Developer
Tool ID 102 003
Media Cabinet 2x tanks; 1x media cabinet
Process Chamber Configuration Other 1x fan spray nozzle; 4x binary nozzles
Footprint (w x l x h) System: 850 x 1050 x 1500 mm Media Cabinet: 530 x 380 x 630 mm
 
 
 
 
 
 
 
 
 
 


System   HMR90    
Description Manual Substrate Cleaner
Tool ID 103 437
Media Cabinet Process Chamber made of PP
Process Chamber Configuration Other Brush, Full jet stand, DI Water Heater, Stand-alone Co2 ionization unit, Central Autofill 3 medias (H2S04, Nh4oh, H2O2)
Footprint (w x l x h) System: 850 x 1050 x 1500
 
 
 
 
 
 
 
 

Available Next-to-New: ModuTrack

System ModuTrack
Description Si Wafer / Developer
Tool ID 210278
Substrate Size 200/300mm
Software Tool Control, GUI, keyboard & monitor
Robot ML-series 3-link

Available Next-to-New: Accesories


Description Stück Refill Cabinets (2)