Next-to-New Equipment
At HamaTech, our engineers have carefully designed our products to last. Over the past 20 years, more than 500 systems have been installed at customer facilities around the world. With equipment lifetimes of over 10 - 15 years, many of these systems are still in operation today demonstrating the true value of German engineering.
Demand for early generation system platforms is strong and HamaTech’s Next-to-New Equipment program is the answer. Next-to-New Equipment is refurbished in the factory by technical experts to ensure the highest level of conformity to specification and is upgraded to meet new technical and safety requirements. Each system comes with installation, process qualification and a full 6 month warranty.
The Next-to-New program is the choice for customers wanting to extend their mask manufacturing capabilities with systems that match existing processes and procedures, complement the existing installed base and are refurbished by the experts. For R&D departments and institutions, the HamaTech Next-to-New program offers flexible, versatile platforms for single substrate manual processing and pilot production programs.
Our current Next-to-New equipment is listed below. The list will be updated periodically with additional hard-to-find equipment. If you do not see what you are looking for on the list please contact us at info@hamatech.de or click on the Contact section of the website. All equipment is available on a first come, first serve basis.
We looking forward to helping you find the perfect match for your equipment needs.
Available Next-to-New Systems: MaskTrack
| System | MaskTrack Develop | |||
| Description | Automated Aqueous Develop Tool | |||
| Tool ID | 210 327 | |||
| Media Cabinet | 2x MaskTrack standard cabinet, refill box for 3 media | |||
| Process Chamber | 2x Process chamber with each: 1x Linear arm with low impact puddle nozzle, Gas free developer dispense system, Surfactant dispense system 1x Swing arm with hole nozzle 4x fanspray, 1x beam rinse, backside rinse, chamber rinse | |||
| Operating System | MS Windows | |||
| Other | Robot handler, SMIF loadport, Aligner, Controlled Mini-Environment HEPA filter, electronic media flow control, Air ionizer system, sump pump 4x Julabo TCU for media temperature control, UPS, Waste cabinet | |||
| Footprint (w x l x h) | Main tool: Media cabinet (double unit): Climate control unit KS2: EMO-Box: TCU double unit: Waste cabinet: Sump pump unit: Refill Box: | 3329mm x 1532mm x 2895mm, 1706mm x 700mm x 1889mm 1200mm x 952mm x 2114mm 800mm x 300mm x 1000mm 350mm x 790mm x 536mm (2x) 1200mm x 750mm x 1346mm 700mm x 600mm x 520mm 935mm x 235mm x 280mm | ||
Available Next-to New Systems: ASx Series
| System | APB | ||
| Description | Automatic Bake System | ||
| Tool ID | 210 328 | ||
| Configuration | 1 hotplate, 1 cooling plate | ||
| Operating System | Windows; | ||
| Other | 1 CPF 3002 with cooling function; 1 Versaport; 1 Julabo incl. HEPA filtration | ||
| Footprint (w x l x h) | System: 1200 x 1200 x 2350 mm Media Cabinet 714 x 1200 x 850 mm EMO Box 600 x 250 x 1000 mm Julabo 350 x 658 x 545 mm CPF 750 x 1050 x 2000 mm |
| System | ASP5500 | |||
| Description | Automated Single Substrate Processor (Aqueous Develop) | |||
| Tool ID | 210 206 | |||
| Media Cabinet | 1x standard cabinet, 2x Refill system, 6 media tanks | |||
| Process Chamber | 2x puddle arm, fulljet arm, 2x low impact puddle nozzle, Gas free developer dispense system, 4x binary nozzle, Chamber rinse, backside rinse | |||
| Operating System | MS Windows | |||
| Other | Robot handler, SMIF loadport, Aligner, 3 acclimatization stations, Controlled Mini-Environment with chemical filtration, HEPA filter, 2x Julabo for media temperature control; electronic media flow control | |||
| Footprint (w x d x h) | Main tool: Media cabinet: Climate control unit: Chemical filtration unit: EMO-Box: Electric Box: TCU: Refill Box: | 1800mm x 1200mm x 2358mm 700mm x 1200mm x 1739mm 750mm x 1550mm x 1930mm 750mm x 1050mm x 1745 600mm x 250mm x 1000mm 600mm x 210mm x 600 350mm x 850mm x 780mm 780mm x 235mm x 280mm | ||
Available Next-to New Systems: HMx Series
| System | HMR90 | |||
| Description | Manual Substrate Cleaner | |||
| Tool ID | 103 437 | |||
| Media Cabinet | Process Chamber made of PP | |||
| Process Chamber Configuration Other | Brush, Full jet stand, DI Water Heater, Stand-alone Co2 ionization unit, Central Autofill 3 medias (H2S04, Nh4oh, H2O2) | |||
| Footprint (w x l x h) | System: 850 x 1050 x 1500 | |||
Available Next-to-New: ModuTrack
| System | ModuTrack | | ||
| Description | Si Wafer / Developer | |||
| Tool ID | 210278 | |||
| Substrate Size | 200/300mm | |||
| Software | Tool Control, GUI, keyboard & monitor | |||
| Robot | ML-series 3-link | |||
Available Next-to-New: Accesories
| Description | Stück Refill Cabinets (2) | | ||


