Product Enhancements
In today’s market, customers are looking beyond the “one-node” installed base. Customers are investing in equipment that spans multiple technology nodes supported by equipment manufacturers offering continuous improvement programs to maximize the useful life of each system. At HamaTech, we are committed to the success of our customers and have developed a flexible portfolio of after-market products versatile enough to solve today’s challenges while extending production lifetime of systems into the future. Our innovative product enhancements allow our customers to increase productivity and maximize the return on capital equipment investments.
Customized Product Enhancement Offering:
HamaTech’s customized product enhancement offering includes a complete post-warranty system audit and evaluation by equipment experts. A comprehensive report is provided for each system in the installed base with recommendations for refurbishment and specific product enhancements to achieve productivity and process goals defined by our customers.
Standard Product Enhancement Portfolio:HamaTech’s standard product enhancement portfolio has been developed to offer a broad range of customers the products to answer the toughest technology challenges.
- Hardware (parts)
- Software Modifications
- On-site operator training
- Installation and process qualification by a qualified senior HamaTech Application and/or Service Engineer
ASx Series:
 | Nano-Binary Spray Technology | Increase particle removal efficiency | |
 | Hot DI Water | Eliminate Ion Residue and avoid backside haze at 90nm technology node | |
 | Ultra-dilute SC1 Generation | Minimize phase loss | |
 | Digitally-Controlled ESD Monitoring Kit | Dynamic controlled ESD protection | |
 | Blank Photomask Pin-less Round Chuck | Prevents backside contamination or imprint of the handling system/chuck. | |
 | O³ Ugrade Kit | Allows for chemical free final clean | |
| (includes ECTFE process chamber and digitally controlled ESD monitoring) | |||
 | SECS/GEM Upgrade |
MaskTrack:
 | Nano-Binary Spray Technology | Increase particle removal efficiency | |
 | Digitally-Controlled ESD Monitoring Kit | Dynamic controlled ESD protection | |
 | High Temperature Hot Plate (300°C) | 100% Sulphate free final clean |