Products

Proven reliability and performance redesigned to meet today’s challenges.


HamaTech’s HMx series, introduced in 1990, was designed to address the needs of customers in the semiconductor industry requiring high quality substrate processing for photomask applications as well as opto-electronics, OLED, and special semiconductor back-end (MEMS) applications

Over the past 18 years, more than 250 HMx systems were installed in each and every captive and merchant mask shop around the world.  With equipment lifetimes over 10 - 15 years, many of these systems are still in operation today demonstrating the value of German engineering combined with high-quality standards. 

The demand for the HMx series continues today and HamaTech’s Next-to-New Equipment program is the answer for customers that want to expand their existing installed base with a system remanufactured by the experts.  HamaTech uses the same attention to quality to refurbish and qualify early generation HMx series systems as it does to manufacture advanced photomask processing systems. Click here to visit HamaTech’s Next-to-New Equipment.

We listened to you:

Our customers in the mask shops, R&D institutions and semiconductor wafer fabs have asked for a system that combines stability with reliability and we listened.  The HMxsquare, manufactured new in the German factory, combines the unparalleled performance of the original HMx series platform with today’s needs for electronic control functions, implementation of new cleaning techniques and environmental and safety requirements. 

The HMxSquare offers the highest first pass cleaning yield in its segment saving customers time and money.  And, with a footprint of 960 x 1120 mm for the base cabinet and 300 x 1070 mm for the media cabinet, the HMxsquare not only gets the job done:  it uses the least amount of expensive cleanroom space in the industry.

 HMxSquare is manually operated and enables processing of small series or pilot production of special substrates. 

Substrates:

  • Chrome and Chrome Oxide photomask  up to 9”
  • Si and GaAs wafers up to 300 mm
  • Special substrates  up to 300mm


Processes:

  • Aqueous based Develop
  • Aqueous based Etch
  • Resist Strip
  • Pre- and Final Clean for
    • Removal of organic  and non-organic contaminants
    • Removal of sub-micron particles
  • Rinse
  • Spin Dry


HMxSquare offers an ESD-safe environment for your sensitive substrates and the system meets or exceeds SEMI Standards.   A wide variety of different chucks for standard and exotic substrates ensures damage-free handling. The compact media cabinet offers safe storage of chemicals. 

We are proud to offer you the HMxSquare, a new system built on proven and reliable technology. At HamaTech, we listen and understand our customer’s needs to develop the products you need today and tomorrow.